"New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" (2009) Wachulak, P.W.;Urbanski, L.;Capeluto, M.G. (...)Marconi, M.C. Journal of Micro/Nanolithography, MEMS, and MOEMS. 8(2)

"New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" (2009) Wachulak, P.W.;Urbanski, L.;Capeluto, M.G. (...)Marconi, M.C. Journal of Micro/Nanolithography, MEMS, and MOEMS. 8(2)

"Nanopatterning in a compact setup using table top extreme ultraviolet lasers" (2008) Wachulak, P.W.;Capeluto, M.G.;Menoni, C.S. (...)Marconi, M.C. Opto-electronics Review. 16(4):444-450

"Nanopatterning in a compact setup using table top extreme ultraviolet lasers" (2008) Wachulak, P.W.;Capeluto, M.G.;Menoni, C.S. (...)Marconi, M.C. Opto-electronics Review. 16(4):444-450

"Table top nanopatterning with extreme ultraviolet laser illumination" (2007) Capeluto, M.G.;Wachulak, P.;Marconi, M.C. (...)Attwood, D.T. Microelectronic Engineering. 84(5-8):721-724

"Table top nanopatterning with extreme ultraviolet laser illumination" (2007) Capeluto, M.G.;Wachulak, P.;Marconi, M.C. (...)Attwood, D.T. Microelectronic Engineering. 84(5-8):721-724

"Nanopillars and arrays of nanoholes fabricated by extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Patel, D. (...)Rocca, J.J. 20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS:486-487

"Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Conference on Lasers and Electro-Optics, 2007, CLEO 2007

"Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Conference on Lasers and Electro-Optics, CLEO 2007

"Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser" (2007) Wachulak, P.W.;Patel, D.;Capeluto, M.G. (...)Marconi, M.C. Soft X-Ray Lasers and Applications VII. 6702

"Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser" (2007) Wachulak, P.W.;Patel, D.;Capeluto, M.G. (...)Marconi, M.C. Soft X-Ray Lasers and Applications VII. 6702

"Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25(6):2094-2097

"Interferometric lithography at 46.9 nm" (2004) Capeluto, M.G.;Vaschenko, G.;Grisham, M.E. (...)Paz J.L. RIAO/OPTILAS 2004: 5th Iberoamerican Meeting on Optics, and 8th Latin American Meeting on Optics, Lasers, and their Applications; ICO Regional Meeting. 5622(PART 2):735-738

"Interferometric lithography at 46.9 nm" (2004) Capeluto, M.G.;Vaschenko, G.;Grisham, M.E. (...)Paz J.L. RIAO/OPTILAS 2004: 5th Iberoamerican Meeting on Optics, and 8th Latin American Meeting on Optics, Lasers, and their Applications; ICO Regional Meeting. 5622(PART 2):735-738