Artículo

Wachulak, P.W.; Urbanski, L.; Capeluto, M.G.; Hill, D.; Rockward, W.S.; Iemmi, C.; Anderson, E.H.; Menoni, C.S.; Rocca, J.J.; Marconi, M.C. "New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" (2009) Journal of Micro/Nanolithography, MEMS, and MOEMS. 8(2)
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Abstract:

The development of tabletop extreme ultraviolet (EUV) lasers opens now the possibility to realize interferometric lithography systems at EUV wavelengths that easily fit on the top of an optical table. The high degree of spatial and temporal coherence and high brightness of the compact EUV laser sources make them a good option for interferometric applications. The combination of these novel sources with interferometric lithography setups brings to the laboratory environment capabilities that so far had been restricted exclusively to large synchrotron facilities. © 2009 Society of Photo-Optical Instrumentation Engineers.

Registro:

Documento: Artículo
Título:New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers
Autor:Wachulak, P.W.; Urbanski, L.; Capeluto, M.G.; Hill, D.; Rockward, W.S.; Iemmi, C.; Anderson, E.H.; Menoni, C.S.; Rocca, J.J.; Marconi, M.C.
Filiación:Colorado State University, NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Fort Collins, CO 80523, United States
Universidad de Buenos Aires, Departmento de Fisica, Facultad de Ciencias Exactas y Naturales, Buenos Aires, Argentina
Morehouse College, Department of Physics, Atlanta, GA 30314, United States
Lawrence Berkeley National Laboratory, Berkeley, CA, United States
Palabras clave:Extreme ultraviolet (EUV) lasers; Interferometric lithography; Nanopatterning; Interferometry; Lithography; Compact EUV lasers; Extreme Ultraviolet; Extreme ultraviolet lasers; High brightness; Interferometric lithography; Laboratory environment; NanoPatterning; Optical tables; Spatial and temporal coherence; Tabletop lasers; Ultraviolet lasers
Año:2009
Volumen:8
Número:2
DOI: http://dx.doi.org/10.1117/1.3129837
Título revista:Journal of Micro/Nanolithography, MEMS, and MOEMS
Título revista abreviado:J. Micro/ Nanolithogr. MEMS MOEMS
ISSN:19325150
CODEN:JMMMG
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_19325150_v8_n2_p_Wachulak

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Citas:

---------- APA ----------
Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., Anderson, E.H.,..., Marconi, M.C. (2009) . New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers. Journal of Micro/Nanolithography, MEMS, and MOEMS, 8(2).
http://dx.doi.org/10.1117/1.3129837
---------- CHICAGO ----------
Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., et al. "New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" . Journal of Micro/Nanolithography, MEMS, and MOEMS 8, no. 2 (2009).
http://dx.doi.org/10.1117/1.3129837
---------- MLA ----------
Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., et al. "New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" . Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 8, no. 2, 2009.
http://dx.doi.org/10.1117/1.3129837
---------- VANCOUVER ----------
Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., et al. New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers. J. Micro/ Nanolithogr. MEMS MOEMS. 2009;8(2).
http://dx.doi.org/10.1117/1.3129837