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Extreme ultraviolet lithography
9
"Blowout jets and impulsive eruptive flares in a bald-patch topology" (2017) Chandra, R.;Mandrini, C.H.;Schmieder, B. (...)Uddin, W. Astronomy and Astrophysics. 598
"Design of a compact device to generate and test beams with orbital angular momentum in the EUV" (2017) Pabon, D.O.; Ledesma, S.A.; Quinteiro, G.F.; Capeluto, M.G. Applied Optics. 56(29):8048-8054
"Efficient picosecond x-ray pulse generation from plasmas in the radiation dominated regime" (2017) Hollinger, R.;Bargsten, C.;Shlyaptsev, V.N. (...)Rocca, J.J. Optica. 4(11):1344-1349
"Comparison of solar radio and extreme ultraviolet synoptic limb charts during the present solar maximum" (2016) Oliveira E Silva, A.J.; Selhorst, C.L.; Simões, P.J.A.; Giménez De Castro, C.G. Astronomy and Astrophysics. 592
"Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology" (2014) Capeluto, M.G.; Marconi, M.C.; Iemmi, C.C. Applied Optics(7):1274-1283
"Design of a phase shifting interferometer in the EUV for high precision metrology" (2011) Capeluto, M.G.; Marconi, M.C.; Iemmi, C. Journal of Physics: Conference Series. 274(1)
"Nanopatterning in a compact setup using table top extreme ultraviolet lasers" (2008) Wachulak, P.W.;Capeluto, M.G.;Menoni, C.S. (...)Marconi, M.C. Opto-electronics Review. 16(4):444-450
"Nanoscale patterning in high resolution HSQ photoresist by interferometric lithography with tabletop extreme ultraviolet lasers" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25(6):2094-2097
"Nanopatterning and nanomachining with table-top extreme ultraviolet lasers" (2006) Marconi, M.C.;Wachulak, P.W.;Capeluto, M.G. (...)Bloom, S. 2006 MRS Fall Meeting. 961:230-235