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Extreme Ultraviolet
5
"Titan's Variable Ionosphere During the T118 and T119 Cassini Flybys" (2018) Edberg, N.J.T.;Vigren, E.;Snowden, D. (...)Cui, J. Geophysical Research Letters. 45(17):8721-8728
"Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology" (2014) Capeluto, M.G.; Marconi, M.C.; Iemmi, C.C. Applied Optics(7):1274-1283
"New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" (2009) Wachulak, P.W.;Urbanski, L.;Capeluto, M.G. (...)Marconi, M.C. Journal of Micro/Nanolithography, MEMS, and MOEMS. 8(2)
"Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Conference on Lasers and Electro-Optics, CLEO 2007
"Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography" (2007) Wachulak, P.W.;Capeluto, M.G.;Marconi, M.C. (...)Rocca, J.J. Conference on Lasers and Electro-Optics, 2007, CLEO 2007