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EUV lasers
6
"Design of a phase shifting interferometer in the EUV for high precision metrology" (2011) Capeluto, M.G.; Marconi, M.C.; Iemmi, C. Journal of Physics: Conference Series. 274(1)
"Nanopatterning in a compact setup using table top extreme ultraviolet lasers" (2008) Wachulak, P.W.;Capeluto, M.G.;Menoni, C.S. (...)Marconi, M.C. Opto-electronics Review. 16(4):444-450
"Nanopatterning in a compact setup using table top extreme ultraviolet lasers" (2008) Wachulak, P.W.;Capeluto, M.G.;Menoni, C.S. (...)Marconi, M.C. Opto-electronics Review. 16(4):444-450
"Table top nanopatterning with extreme ultraviolet laser illumination" (2007) Capeluto, M.G.;Wachulak, P.;Marconi, M.C. (...)Attwood, D.T. Microelectronic Engineering. 84(5-8):721-724
"Table top nanopatterning with extreme ultraviolet laser illumination" (2007) Capeluto, M.G.;Wachulak, P.;Marconi, M.C. (...)Attwood, D.T. Microelectronic Engineering. 84(5-8):721-724
"Nanopatterning with interferometric lithography using a compact λ = 46.9-nm laser" (2006) Capeluto, M.G.;Vaschenko, G.;Grisham, M. (...)Rocca, J.J. IEEE Transactions on Nanotechnology. 5(1):3-6