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2009
1185
Journal of Micro/Nanolithography, MEMS, and MOEMS
1
"New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers" (2009) Wachulak, P.W.;Urbanski, L.;Capeluto, M.G. (...)Marconi, M.C. Journal of Micro/Nanolithography, MEMS, and MOEMS. 8(2)