Conferencia

Salomone, L.S.; Kasulin, A.; Inza, M.G.; Lipovetzky, J.; Redin, E.; Carbonetto, S.; Campabadal, F.; Faigón, A. "Radiation effects on high-k dielectrics. Measurement technique and first results" (2010) 4th Argentine School of Micro-Nanoelectronics, Technology and Applications and 1st Uruguay School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2010:66-70
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Abstract:

The radiation response of MOS capacitors with HfO2 as insulator was investigated. The development of instrumental for such goal is presented. First results and analysis are presented.

Registro:

Documento: Conferencia
Título:Radiation effects on high-k dielectrics. Measurement technique and first results
Autor:Salomone, L.S.; Kasulin, A.; Inza, M.G.; Lipovetzky, J.; Redin, E.; Carbonetto, S.; Campabadal, F.; Faigón, A.
Ciudad:Montevideo
Filiación:Device Physics Laboratory-Microelectronics, Departamento de Física, Universidad de Buenos Aires, Av. Paseo Colón 850, Buenos Aires, Argentina
Instituto de Microelectrónica de Barcelona, Centro Nacional de Microelectrónica, Consejo Superior de Investigaciones Científicas (CSIC), Spain
CONICET, Argentina
Palabras clave:High-K dielectrics; MOS; Radiation effects; High-k dielectric; Measurement techniques; MOS; Radiation response; Hafnium compounds; MOS capacitors; Nanoelectronics; Radiation effects
Año:2010
Página de inicio:66
Página de fin:70
Título revista:4th Argentine School of Micro-Nanoelectronics, Technology and Applications and 1st Uruguay School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2010
Título revista abreviado:Proc. Argent.-Uruguay Sch. Micro-Nanoelectronics, Technol. Appl., EAMTA
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_97898716_v_n_p66_Salomone

Referencias:

  • Gusev, E.P., Cartier, E., Buchanan, D.A., Gribelyuk, M., Copel, M., Okorn-Schmidt, H., D'Emic, C., Ultrathin high-K metal oxides on silicon: Processing, characterization and integration issues (2001) Microelectronic Engineering, 59 (1-4), pp. 341-349. , DOI 10.1016/S0167-9317(01)00667-0, PII S0167931701006670
  • Stathis, J.H., Physical and predictive models of ultrathin oxide reliability in CMOS Devices and Circuits (2001) IEEE Transactions on Device and Materials Reliability, 1 (1)
  • Stathis, J.H., Percolation model for gate oxide breakdown (1999) Journal of Applied Physics, 86 (10)
  • Fischetti, M.V., Laux, S.E., Performance degradation of small silicon devices caused by long-range Coulomb interactions (2000) Applied Physics Letters, 76 (16)
  • Javey, A., Kim, H., Brink, M., Wang, Q., Ural, A., Guo, J., McIntyre, P., Dai, H., High-k dielectrics for advanced carbon-nanotube transistors and logic gates (2002) Nature Materials, 1, pp. 241-246
  • Kuo, Y., Mixed oxide high-k gate dielectrics - Interface layer structure, breakdown mechanism, and memories (2006) ECS 210th Meeting
  • Seo, K., Sreenivasan, R., McIntyre, P.C., Saraswat, K.C., Improvement in High-k (HfO2-SiO2) reliability by incorporation of fluorine (2006) IEEE Electron Device Letters, 27 (10)
  • Zhang, J.F., Zhao, C.Z., Chen, A.H., Groeseneken, G., Degraeve, R., Hole traps in silicon dioxides-part i: Properties (2004) IEEE Transactions on Electron Devices, 51 (8)
  • Zhao, C.Z., Zhang, J.F., Groeseneken, G., Degraeve, R., Hole traps in silicon dioxides-part II: Generation mechanism (2004) IEEE Transactions on Electron Devices, 51 (8)
  • Zhao, C.Z., Zhang, J.F., Chang, M.H., Peaker, A.R., Hall, S., Groeseneken, G., Pantisano, L., Heyns, M., Stress- induced positive charge in hf-based gate dielectrics: Impact on device performance and a framework for the defect (2008) IEEE Transactions on Electron Devices, 55 (7)
  • Chang, M.H., Shang, J.F., On positive charge formed under negative bias temperature stress (2007) Journal of Applied Physics, 101
  • Zhang, J.F., Zhao, C.Z., Chang, M.H., Zahid, M.B., Peaker, A.R., Hall, S., Groeseneken, G., Heyns, M., Impact of different defects on the kinetics of negative bias temperature instability of hafnium stacks (2008) Applied Physics Letters, 92
  • Zhang, J.F., Defects and instabilities in Hf-dielectric/SiON stacks (2009) Microelectronic Engineering
  • Harris, H.R., Choi, R., Sim, J.H., Young, C.D., Majhi, P., Lee, B.H., Bersuker, G., Electrical observation of deep traps in high-/metal gate stack transistors (2005) IEEE Electron Device Letters, 26 (11)
  • Felix, J.A., Fleetwood, D.M., Schrimpf, R.D., Hong, J.G., Lucovsky, G., Schwank, J.R., Shaneyfelt, M.R., Total-dose radiation response of hafnium- silicate capacitors (2002) IEEE Transactions on Nuclear Science, 49 (6)
  • Zhao, C.Z., Taylor, S., Werner, M., Chalker, P.R., Potter, R.J., Gaskell, J.M., Jones, A.C., High-k materials and their response to gamma ray radiation (2009) Journal of Vacuum Science and Technology B, 27, pp. 411-415
  • Zhao, C.Z., Werner, M., Taylor, S., Chalker, P.R., Potter, R.J., Gaskell, J.M., High-k dielectrics' radiation response to x-ray and gammaray exposure (2009) IEEE Proceedings of 16th IPFA
  • Ergin, F.B., Turan, R., Shishiyanu, S.T., Yilmaz, E., Effect of gamma-radiation on HfO2 based MOS capacitor Nuclear Instruments and Methods in Physics Research B, 268 (2010), pp. 1482-1485A4 - SSCS; CAS; MOSIS; IEEE; ANII

Citas:

---------- APA ----------
Salomone, L.S., Kasulin, A., Inza, M.G., Lipovetzky, J., Redin, E., Carbonetto, S., Campabadal, F.,..., Faigón, A. (2010) . Radiation effects on high-k dielectrics. Measurement technique and first results. 4th Argentine School of Micro-Nanoelectronics, Technology and Applications and 1st Uruguay School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2010, 66-70.
Recuperado de https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_97898716_v_n_p66_Salomone [ ]
---------- CHICAGO ----------
Salomone, L.S., Kasulin, A., Inza, M.G., Lipovetzky, J., Redin, E., Carbonetto, S., et al. "Radiation effects on high-k dielectrics. Measurement technique and first results" . 4th Argentine School of Micro-Nanoelectronics, Technology and Applications and 1st Uruguay School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2010 (2010) : 66-70.
Recuperado de https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_97898716_v_n_p66_Salomone [ ]
---------- MLA ----------
Salomone, L.S., Kasulin, A., Inza, M.G., Lipovetzky, J., Redin, E., Carbonetto, S., et al. "Radiation effects on high-k dielectrics. Measurement technique and first results" . 4th Argentine School of Micro-Nanoelectronics, Technology and Applications and 1st Uruguay School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2010, 2010, pp. 66-70.
Recuperado de https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_97898716_v_n_p66_Salomone [ ]
---------- VANCOUVER ----------
Salomone, L.S., Kasulin, A., Inza, M.G., Lipovetzky, J., Redin, E., Carbonetto, S., et al. Radiation effects on high-k dielectrics. Measurement technique and first results. Proc. Argent.-Uruguay Sch. Micro-Nanoelectronics, Technol. Appl., EAMTA. 2010:66-70.
Available from: https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_97898716_v_n_p66_Salomone [ ]