Conferencia
Abstract:
A plasma immersion ion implantation and deposition (PIII&D) system was recently built at INFIP. A dc cathodic arc with a Ti cathode of 5 cm in diameter and an annular anode of 8cm in diameter was employed as the plasma source. The substrate chamber was electrically insulated and connected with the main discharge chamber through a straight magnetic duct. The discharge current was run at 100 A. The substrate was biased with a pulsed generator (30 kV, 30 A, 0.05-3 kHz) based on a pulse transformer controlled by IGBT switches. In this work the optimization of the process as function of the pulse parameters is presented. The characteristics of Ti coatings on steel substrates obtained varying the pulse amplitude from 2 to 12 kV and the pulse frequency from 200 Hz to 400 Hz were analyzed and compared with films grown without biasing the substrate. The thickness was determined weighting the samples before and after the treatment. The morphology was observed with an atomic force microscope. The film structure was studied by x-ray diffraction.
Registro:
| Documento: | Conferencia |
| Título: | Optimization of a PIII&D system using a cathodic arc with titanium |
| Autor: | Fazio, M.; Kleiman, A.; Lamas, D.G.; Grondona, D.; Marquez, A. |
| Ciudad: | Santiago |
| Filiación: | Instituto de Física Del Plasma, FCEN, Universidad de Buenos Aires-CONICET, Argentina Centro de Investigaciones en Sólidos (CINSO), CONICET-CITEDEF, San Juan Bautista de La Salle 4397, Villa Martelli B1603ALO, Buenos Aires, Argentina CONICET, Argentina |
| Palabras clave: | Atomic force microscopy; Electrodes; Ion implantation; Plasma applications; Pulse transformers; Substrates; X ray diffraction; Discharge chamber; Discharge currents; Film structure; Plasma immersion ion implantation and deposition; Pulse amplitude; Pulse frequencies; Pulse parameter; Steel substrate; Electric discharges |
| Año: | 2014 |
| Volumen: | 511 |
| Número: | 1 |
| DOI: | http://dx.doi.org/10.1088/1742-6596/511/1/012069 |
| Título revista: | 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010 |
| Título revista abreviado: | J. Phys. Conf. Ser. |
| ISSN: | 17426588 |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_17426588_v511_n1_p_Fazio |
Referencias:
- Attenberger, W., Thorwarth, G., Manova, D., Mändl, S., Stritzker, B., Rauschenbach, B., (2001) Surf. Coat. Technol., 142-144, p. 412. , 10.1016/S0257-8972(01)01080-5 0257-8972A4 -
Citas:
---------- APA ----------
Fazio, M., Kleiman, A., Lamas, D.G., Grondona, D. & Marquez, A. (2014) . Optimization of a PIII&D system using a cathodic arc with titanium. 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010, 511(1).http://dx.doi.org/10.1088/1742-6596/511/1/012069
---------- CHICAGO ----------
Fazio, M., Kleiman, A., Lamas, D.G., Grondona, D., Marquez, A. "Optimization of a PIII&D system using a cathodic arc with titanium" . 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010 511, no. 1 (2014).http://dx.doi.org/10.1088/1742-6596/511/1/012069
---------- MLA ----------
Fazio, M., Kleiman, A., Lamas, D.G., Grondona, D., Marquez, A. "Optimization of a PIII&D system using a cathodic arc with titanium" . 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010, vol. 511, no. 1, 2014.http://dx.doi.org/10.1088/1742-6596/511/1/012069
---------- VANCOUVER ----------
Fazio, M., Kleiman, A., Lamas, D.G., Grondona, D., Marquez, A. Optimization of a PIII&D system using a cathodic arc with titanium. J. Phys. Conf. Ser. 2014;511(1).http://dx.doi.org/10.1088/1742-6596/511/1/012069
