Conferencia
Abstract:
Nanostructured Ti films were obtained employing a cathodic arc with a straight magnetic filter. The films were characterized using X-ray diffraction, scanning electron and atomic force microscopy. The films were found to be dense and with columnar grains, whose size increased with the exposure time. The number of macroparticles, the film roughness and the deposition rate were also analyzed, and the latter compared with the results of a fluid plasma model. Number of macroparticles and film roughness in samples located ahead of the magnetic duct inlet were higher than those determined from samples placed inside the magnetic duct. The deposition rate depended on the axial and radial position inside the duct. The thickness along the radial position was more uniform for samples located at axial positions near the filter extremes, but the mean deposition rate was lower at these positions. Measured and modeled deposition rates agreed reasonably well.
Registro:
| Documento: | Conferencia |
| Título: | Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| Autor: | Bermeo, F.; Torre, H.D.; Kleiman, A.; Minotti, F.; Marquez, A. |
| Ciudad: | Santiago |
| Filiación: | Universidad Santiago de Cali, Calle 5 #, 62-00 Cali, Colombia Universidad Del Valle, Calle 13 #, 100-00 Cali, Colombia Instituto de Fisica Del Plasma, Universidad de Buenos Aires-CONICET, Ciudad Universitaria, C1428EGA Buenos Aires, Argentina CONICET, Argentina |
| Palabras clave: | Atomic force microscopy; Deposition; Deposition rates; Magnetism; Titanium; X ray diffraction; Axial positions; Columnar grain; Film roughness; Macro-particles; Nanostructured Ti; Radial position; Scanning electrons; Titanium film; Ducts |
| Año: | 2014 |
| Volumen: | 511 |
| Número: | 1 |
| DOI: | http://dx.doi.org/10.1088/1742-6596/511/1/012070 |
| Título revista: | 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010 |
| Título revista abreviado: | J. Phys. Conf. Ser. |
| ISSN: | 17426588 |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_17426588_v511_n1_p_Bermeo |
Referencias:
- Vyskocil, J., Musil, J., (1992) J. Vac. Sci. Technol., 10 (4), p. 1740. , 10.1116/1.577741 0734-2101 A
- Boxman, R.L., Sanders, D.M., Martin, P.J., (1995) Handbook of Vacuum Arc Science and Technology, Fundamentals and Applications, , Park Ridge, NJ: Noyes
- Giuliani, L., Minotti, F.O., Grondona, D., Kelly, H., (2007) IEEE Trans. Plasma Sci., 35 (6), p. 1710. , 10.1109/TPS.2007.910213 0093-3813
- Lieberman, M., Lichtenberg, A., (2005) Principles of Plasma Discharges and Material Processing, pp. 152-154. , 10.1002/0471724254 (Hoboken, NJ: Wiley-2nd edn)A4 -
Citas:
---------- APA ----------
Bermeo, F., Torre, H.D., Kleiman, A., Minotti, F. & Marquez, A. (2014) . Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct. 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010, 511(1).http://dx.doi.org/10.1088/1742-6596/511/1/012070
---------- CHICAGO ----------
Bermeo, F., Torre, H.D., Kleiman, A., Minotti, F., Marquez, A. "Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct" . 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010 511, no. 1 (2014).http://dx.doi.org/10.1088/1742-6596/511/1/012070
---------- MLA ----------
Bermeo, F., Torre, H.D., Kleiman, A., Minotti, F., Marquez, A. "Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct" . 15th International Congress on Plasma Physics, ICPP 2010 and 13th Latin American Workshop on Plasma Physics, LAWPP 2010, vol. 511, no. 1, 2014.http://dx.doi.org/10.1088/1742-6596/511/1/012070
---------- VANCOUVER ----------
Bermeo, F., Torre, H.D., Kleiman, A., Minotti, F., Marquez, A. Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct. J. Phys. Conf. Ser. 2014;511(1).http://dx.doi.org/10.1088/1742-6596/511/1/012070
