Abstract:
The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p→s and s→p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique. © 2003 Optical Society of America.
Registro:
Documento: |
Artículo
|
Título: | Polarization conversion from highly conducting, asymmetric trapezoidal gratings |
Autor: | Depine, R.A.; Inchaussandague, M.E. |
Filiación: | Grupo de Electromagnetismo Aplicado, Departamento de Física, Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Ciudad Universitaria, Pabellón I, Buenos Aires, 1428, Argentina
|
Palabras clave: | Conductive materials; Light polarization; Light reflection; Nondestructive examination; Polarization conversion; Diffraction gratings |
Año: | 2003
|
Volumen: | 42
|
Número: | 19
|
Página de inicio: | 3742
|
Página de fin: | 3744
|
DOI: |
http://dx.doi.org/10.1364/AO.42.003742 |
Título revista: | Applied Optics
|
Título revista abreviado: | Appl. Opt.
|
ISSN: | 1559128X
|
Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1559128X_v42_n19_p3742_Depine |
Referencias:
- Logofatu, P.C., Coulombe, S.A., Minhas, B.K., McNeil, J.R., Identity of the cross-reflection coefficients for symmetric surface-relief gratings (1999) J. Opt. Soc. Am. A, 16, pp. 1108-1114
- Li, L., Symmetries of cross-polarization diffraction coefficients of gratings (2000) J. Opt. Soc. Am. A, 17, pp. 881-887
- Vincent, P., Neviere, M., The reciprocity theorem for corrugated surfaces used in conical diffraction mountings (1979) Opt. Acta, 26, pp. 889-898
- Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction (1995) Opt. Commun., 117, pp. 223-227
- Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction: Erratum (2001) Opt. Com Mun., 190, p. 391
- Chandezon, J., Dupuis, M., Cornet, G., Maystre, D., Multicoated gratings: A differential formalism applicable in the entire optical region (1982) J. Opt. Soc. Am. A, 72, pp. 839-846
- Li, L., Multilayer-coated diffraction gratings: Differential method of Chandezon et al. Revisited (1994) J. Opt. Soc. Am. A, 11, pp. 2816-2828
- Li, L., Chandezon, J., Improvement of the coordinate transformation method for surface-relief gratings with sharp edges (1996) J. Opt. Soc. Am. A, 13, pp. 2247-2255
- Depine, R., Lester, M., Internal symmetries in conical diffraction from metallic gratings (2001) J. Mod. Opt., 48, pp. 1405-1411
Citas:
---------- APA ----------
Depine, R.A. & Inchaussandague, M.E.
(2003)
. Polarization conversion from highly conducting, asymmetric trapezoidal gratings. Applied Optics, 42(19), 3742-3744.
http://dx.doi.org/10.1364/AO.42.003742---------- CHICAGO ----------
Depine, R.A., Inchaussandague, M.E.
"Polarization conversion from highly conducting, asymmetric trapezoidal gratings"
. Applied Optics 42, no. 19
(2003) : 3742-3744.
http://dx.doi.org/10.1364/AO.42.003742---------- MLA ----------
Depine, R.A., Inchaussandague, M.E.
"Polarization conversion from highly conducting, asymmetric trapezoidal gratings"
. Applied Optics, vol. 42, no. 19, 2003, pp. 3742-3744.
http://dx.doi.org/10.1364/AO.42.003742---------- VANCOUVER ----------
Depine, R.A., Inchaussandague, M.E. Polarization conversion from highly conducting, asymmetric trapezoidal gratings. Appl. Opt. 2003;42(19):3742-3744.
http://dx.doi.org/10.1364/AO.42.003742