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Abstract:

The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p→s and s→p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique. © 2003 Optical Society of America.

Registro:

Documento: Artículo
Título:Polarization conversion from highly conducting, asymmetric trapezoidal gratings
Autor:Depine, R.A.; Inchaussandague, M.E.
Filiación:Grupo de Electromagnetismo Aplicado, Departamento de Física, Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Ciudad Universitaria, Pabellón I, Buenos Aires, 1428, Argentina
Palabras clave:Conductive materials; Light polarization; Light reflection; Nondestructive examination; Polarization conversion; Diffraction gratings
Año:2003
Volumen:42
Número:19
Página de inicio:3742
Página de fin:3744
DOI: http://dx.doi.org/10.1364/AO.42.003742
Título revista:Applied Optics
Título revista abreviado:Appl. Opt.
ISSN:1559128X
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1559128X_v42_n19_p3742_Depine

Referencias:

  • Logofatu, P.C., Coulombe, S.A., Minhas, B.K., McNeil, J.R., Identity of the cross-reflection coefficients for symmetric surface-relief gratings (1999) J. Opt. Soc. Am. A, 16, pp. 1108-1114
  • Li, L., Symmetries of cross-polarization diffraction coefficients of gratings (2000) J. Opt. Soc. Am. A, 17, pp. 881-887
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  • Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction: Erratum (2001) Opt. Com Mun., 190, p. 391
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Citas:

---------- APA ----------
Depine, R.A. & Inchaussandague, M.E. (2003) . Polarization conversion from highly conducting, asymmetric trapezoidal gratings. Applied Optics, 42(19), 3742-3744.
http://dx.doi.org/10.1364/AO.42.003742
---------- CHICAGO ----------
Depine, R.A., Inchaussandague, M.E. "Polarization conversion from highly conducting, asymmetric trapezoidal gratings" . Applied Optics 42, no. 19 (2003) : 3742-3744.
http://dx.doi.org/10.1364/AO.42.003742
---------- MLA ----------
Depine, R.A., Inchaussandague, M.E. "Polarization conversion from highly conducting, asymmetric trapezoidal gratings" . Applied Optics, vol. 42, no. 19, 2003, pp. 3742-3744.
http://dx.doi.org/10.1364/AO.42.003742
---------- VANCOUVER ----------
Depine, R.A., Inchaussandague, M.E. Polarization conversion from highly conducting, asymmetric trapezoidal gratings. Appl. Opt. 2003;42(19):3742-3744.
http://dx.doi.org/10.1364/AO.42.003742