Artículo
Abstract:
We have developed a method for calibrating subnanometer movements of a piezoelectric actuator with picometer accuracy and for a wide range of frequencies. This range make this calibration useful for scanning probe microscopes, particularly for an apertureless scanning near-field optical microscope in which the tip is dithered to modulate the optical signal. The setup consists of a Michelson interferometer that has a mobile arm capable of moving more than one fringe. The piezoelectric actuator to be calibrated vibrates at the desired frequency in the other arm. Net displacement can be calculated by simultaneous measurement of an interferometric signal and its derivative. Hysteresis of the system can be also measured. It will be shown that the actuator response is linear only for the low-frequency region (in our case as much as approximately 10 kHz). Above that frequency range, higher harmonics appear and cannot be neglected to obtain real displacement. Finally, it will be shown that the use of higher harmonics in calibration or detection schemes (that rely on the linearity of the response) must be validated, and this technique has proved adequate for that purpose. © 2002 Optical Society of America.
Registro:
| Documento: | Artículo |
| Título: | Calibration of subnanometer motion with picometer accuracy |
| Autor: | Grecco, H.E.; Martínez, O.E. |
| Filiación: | Laboratorio de Electrónica Cuántica, Departamento de Física Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Pabellón 1, Ciudad Universitaria, Buenos Aires, C1428EHA, Argentina |
| Palabras clave: | Actuators; Harmonic analysis; Interferometers; Interferometry; Microscopes; Near field scanning optical microscopy; Piezoelectric devices; Signal processing; Scanning probe microscopes; Optical devices |
| Año: | 2002 |
| Volumen: | 41 |
| Número: | 31 |
| Página de inicio: | 6646 |
| Página de fin: | 6650 |
| DOI: | http://dx.doi.org/10.1364/AO.41.006646 |
| Título revista: | Applied Optics |
| Título revista abreviado: | Appl. Opt. |
| ISSN: | 1559128X |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1559128X_v41_n31_p6646_Grecco |
Referencias:
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Citas:
---------- APA ----------
Grecco, H.E. & Martínez, O.E. (2002) . Calibration of subnanometer motion with picometer accuracy. Applied Optics, 41(31), 6646-6650.http://dx.doi.org/10.1364/AO.41.006646
---------- CHICAGO ----------
Grecco, H.E., Martínez, O.E. "Calibration of subnanometer motion with picometer accuracy" . Applied Optics 41, no. 31 (2002) : 6646-6650.http://dx.doi.org/10.1364/AO.41.006646
---------- MLA ----------
Grecco, H.E., Martínez, O.E. "Calibration of subnanometer motion with picometer accuracy" . Applied Optics, vol. 41, no. 31, 2002, pp. 6646-6650.http://dx.doi.org/10.1364/AO.41.006646
---------- VANCOUVER ----------
Grecco, H.E., Martínez, O.E. Calibration of subnanometer motion with picometer accuracy. Appl. Opt. 2002;41(31):6646-6650.http://dx.doi.org/10.1364/AO.41.006646
