Artículo

Der, M.; Olmos, C.; Rosero, G.; Santizo, I.; Fernandez, T.; Dieguez, M.; Sacco, F.; Granell, P.; Golmar, F.; Lerner, B.; Lasorsa, C.; Perez, M. "Characterization of fabrication process of micropores on silicon substrate by electrochemical method " (2018) Revista Materia. 23(2)
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Abstract:

In the present work, the fabrication process of a set of micropores on crystalline silicon wafers manufactured through wet etching technique was studied. The influence of different control factors such as voltage, temperature and braking agent on the specific characteristics of formation was evaluated. An exhaustive analysis of the evolution of electric currents during the fabrication made possible to standardize the process and determine the pore-formation time, essential feature considering the exigent requirements of industry. Finally, it was concluded that optimum conditions for a controlled fabrication of pores correspond to a temperature of 84 °C, HCl as a braking agent and voltages of 0,1V, 0,5V and 1V respectively. The above results are of great importance in different fields, such as biology or medicine, in relation to the utility of pores as sensing devices. © 2018, Universidade Federal do Rio de Janeiro. All rights reserved.

Registro:

Documento: Artículo
Título:Characterization of fabrication process of micropores on silicon substrate by electrochemical method
Autor:Der, M.; Olmos, C.; Rosero, G.; Santizo, I.; Fernandez, T.; Dieguez, M.; Sacco, F.; Granell, P.; Golmar, F.; Lerner, B.; Lasorsa, C.; Perez, M.
Filiación:Departamento de Física, Facultad de Ciencias Exactas y Naturales, Universidad de Buenos Aires, Cuidad Universitaria, Buenos Aires, Buenos Aires, Buenos Aires 1428, Argentina
Universidad Tecnológica Nacional, Facultad Regional Haedo, Grupo de Ingeniería de Recubrimientos especiales y nanotecnología (IREN), Sarmiento, Buenos Aires, Buenos Aires, Argentina
Instituto de Genética “Ewald A. Favret”, CICVyA-INTA CASTELAR, Castelar, Buenos Aires, Buenos Aires, Argentina
Instituto Nacional de Tecnología Industrial, Buenos Aires, Argentina
Palabras clave:Biological sensors; Macropores; Silicon; Wet etching
Año:2018
Volumen:23
Número:2
DOI: http://dx.doi.org/10.1590/S1517-707620180002.0461
Título revista:Revista Materia
Título revista abreviado:Rev. Mater.
ISSN:15177076
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_15177076_v23_n2_p_Der

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Citas:

---------- APA ----------
Der, M., Olmos, C., Rosero, G., Santizo, I., Fernandez, T., Dieguez, M., Sacco, F.,..., Perez, M. (2018) . Characterization of fabrication process of micropores on silicon substrate by electrochemical method . Revista Materia, 23(2).
http://dx.doi.org/10.1590/S1517-707620180002.0461
---------- CHICAGO ----------
Der, M., Olmos, C., Rosero, G., Santizo, I., Fernandez, T., Dieguez, M., et al. "Characterization of fabrication process of micropores on silicon substrate by electrochemical method " . Revista Materia 23, no. 2 (2018).
http://dx.doi.org/10.1590/S1517-707620180002.0461
---------- MLA ----------
Der, M., Olmos, C., Rosero, G., Santizo, I., Fernandez, T., Dieguez, M., et al. "Characterization of fabrication process of micropores on silicon substrate by electrochemical method " . Revista Materia, vol. 23, no. 2, 2018.
http://dx.doi.org/10.1590/S1517-707620180002.0461
---------- VANCOUVER ----------
Der, M., Olmos, C., Rosero, G., Santizo, I., Fernandez, T., Dieguez, M., et al. Characterization of fabrication process of micropores on silicon substrate by electrochemical method . Rev. Mater. 2018;23(2).
http://dx.doi.org/10.1590/S1517-707620180002.0461