Artículo
Pu, C.; Park, S.; Chu, P.B.; Lee, S.-S.; Tsai, M.; Peale, D.; Bonadeo, N.H.; Brener, I. "Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes" (2004) IEEE Journal on Selected Topics in Quantum Electronics. 10(3):472-477
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Abstract:
We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times.
Registro:
| Documento: | Artículo |
| Título: | Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
| Autor: | Pu, C.; Park, S.; Chu, P.B.; Lee, S.-S.; Tsai, M.; Peale, D.; Bonadeo, N.H.; Brener, I. |
| Filiación: | Tellium, Inc., Oceanport, NJ 07757, United States Lehigh University, Bethlehem, PA 18015, United States Applied MEMS, Stafford, TX 77477, United States Seagate Research, Seagate Technology, Pittsburgh, PA 15222, United States SiWave, Inc., Arcadia, CA 91006, United States Tessera Technologies, San Jose, CA 95134, United States KLA-Tencor, San Diego, CA 92121, United States CONICET, Departamento de Fisica, UBA, Buenos Aires, Argentina Amersham Biosciences, Piscataway, NJ 08854, United States |
| Palabras clave: | Electrostatic actuation; Microelectromechanical systems (MEMS); Optical cross-connect (OXC); Optical switching; Sidewall-electrodes; Digital to analog conversion; Electric potential; Electrodes; Electrostatic actuators; Mirrors; Natural frequencies; Optical switches; Resonance; Switching systems; Electrostatic fringing fields; Optical cross-connects (OXC); Optical switching; Sidewall electrodes; Microelectromechanical devices |
| Año: | 2004 |
| Volumen: | 10 |
| Número: | 3 |
| Página de inicio: | 472 |
| Página de fin: | 477 |
| DOI: | http://dx.doi.org/10.1109/JSTQE.2004.828480 |
| Título revista: | IEEE Journal on Selected Topics in Quantum Electronics |
| Título revista abreviado: | IEEE J Sel Top Quantum Electron |
| ISSN: | 1077260X |
| CODEN: | IJSQE |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1077260X_v10_n3_p472_Pu |
Referencias:
- Chu, P.B., Lee, S.S., Park, S., MEMS: The path to large optical crossconnects (2002) IEEE Commun. Mag., 40, pp. 80-87. , Mar
- Aksyuk, V.A., Pardo, F., Carr, D., Greywall, D., Chan, H.B., Simon, M.E., Gasparyan, A., Bishop, D., Beam-steering micromirrors for large optical cross-connects (2003) J. Lightwave Technol., 21 (3), pp. 634-642
- Bishop, D.J., Giles, C.R., Austin, G.P., The lucent lambdarouter: MEMS technology of the future here today (2002) IEEE Commun. Mag., 40, pp. 75-79. , Mar
- Degani, O., Socher, E., Lipson, A., Lejtner, T., Setter, D.J., Kaldor, S., Nemirovsky, Y., Pull-in study of an electrostatic torsion microactuator (1998) J. MEMS, 7 (4), pp. 373-379
- Brosniham, T.J., Brown, S.A., Brogan, A., Gormley, C.S., Collins, D.J., Sherman, S.J., Lemkin, M., Davis, M.S., Optical IMEMS - A fabrication process for MEMS optical switches with integrated on-chip electronics (2003) Proc. Transducers'03, 12th Int. Conf. Solid State Sensors, Actuators, and Micro-Systems, pp. 1638-1642. , Boston, MA
- Brener, I., Chu, P.B., Tsai, M., Pu, C., Chou, M., Dadap, J., Lee, D., Gibson, R., Nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch (2003) Tech. Dig. Optical Fiber Communication Conf. 2003, WM1, pp. 385-386. , Atlanta, GA
- Juneau, T., Unterkofler, K., Seliverstov, T., Zhang, S., Judy, M., Dual-axis optical mirror positioning using a nonlinear closed-loop controller (2003) Proc. Transducers'03, 12th Int. Conf. Solid State Sensors, Actuators and Micro-systems, pp. 560-563. , Boston, MA
Citas:
---------- APA ----------
Pu, C., Park, S., Chu, P.B., Lee, S.-S., Tsai, M., Peale, D., Bonadeo, N.H.,..., Brener, I. (2004) . Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes. IEEE Journal on Selected Topics in Quantum Electronics, 10(3), 472-477.http://dx.doi.org/10.1109/JSTQE.2004.828480
---------- CHICAGO ----------
Pu, C., Park, S., Chu, P.B., Lee, S.-S., Tsai, M., Peale, D., et al. "Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes" . IEEE Journal on Selected Topics in Quantum Electronics 10, no. 3 (2004) : 472-477.http://dx.doi.org/10.1109/JSTQE.2004.828480
---------- MLA ----------
Pu, C., Park, S., Chu, P.B., Lee, S.-S., Tsai, M., Peale, D., et al. "Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes" . IEEE Journal on Selected Topics in Quantum Electronics, vol. 10, no. 3, 2004, pp. 472-477.http://dx.doi.org/10.1109/JSTQE.2004.828480
---------- VANCOUVER ----------
Pu, C., Park, S., Chu, P.B., Lee, S.-S., Tsai, M., Peale, D., et al. Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes. IEEE J Sel Top Quantum Electron. 2004;10(3):472-477.http://dx.doi.org/10.1109/JSTQE.2004.828480
