Abstract:
Niobium carbide thin films were prepared by pulsed laser ablation of a stoichiometric NbC target. XeCl (308 nm, 30 ns) and Nd:YAG (266 nm, 5 ns) lasers operating at a repetition rate of 10 Hz were used. Films were deposited on Si (100) substrates at room temperature either in vacuum or in an argon atmosphere (2 × 10-1 mbar). Different laser fluences (2, 4 and 6 J/cm2) and different numbers of pulses (1 × 104, 2 × 104 and 4 × 104) were tested. For the first time, NbC films were prepared through a clean procedure without the addition of a hydrocarbon atmosphere. The phase constitution of the films, unit cell size, mean crystallite dimensions and preferred orientation are determined as a function of deposition conditions by X-ray diffraction. Complementary morphological and structural analysis of the films were performed by scanning electron microscopy, atomic force microscopy and Rutherford backscattering spectroscopy. © Springer-Verlag 1999.
Registro:
Documento: |
Artículo
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Título: | Deposition of NbC thin films by pulsed laser ablation |
Autor: | Duhalde, S.; Colaco, R.; Audebert, F.; Perrone, A.; Zocco, A. |
Filiación: | Dpto. de Fisica, Fac. de Ingenieria, UBA, Paseo Colon 850, Buenos Aires, Argentina Dpto. de Engenharia de Materials, Instituto Superior Tecnico, Av. Rovisco Pais 1096, Lisboa Codex, Portugal Università di Lecce, Dipartimento di Fisica, Istituto Nazionale Fisica della Materia (INFM), Via Arnesano, CP 193, 73100 Lecce, Italy
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Año: | 1999
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Volumen: | 69
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Número: | 7
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Página de inicio: | S569
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Página de fin: | S571
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DOI: |
http://dx.doi.org/10.1007/s003390051475 |
Título revista: | Applied Physics A: Materials Science and Processing
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Título revista abreviado: | Appl Phys A
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ISSN: | 09478396
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CODEN: | APAMF
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Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_09478396_v69_n7_pS569_Duhalde |
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Citas:
---------- APA ----------
Duhalde, S., Colaco, R., Audebert, F., Perrone, A. & Zocco, A.
(1999)
. Deposition of NbC thin films by pulsed laser ablation. Applied Physics A: Materials Science and Processing, 69(7), S569-S571.
http://dx.doi.org/10.1007/s003390051475---------- CHICAGO ----------
Duhalde, S., Colaco, R., Audebert, F., Perrone, A., Zocco, A.
"Deposition of NbC thin films by pulsed laser ablation"
. Applied Physics A: Materials Science and Processing 69, no. 7
(1999) : S569-S571.
http://dx.doi.org/10.1007/s003390051475---------- MLA ----------
Duhalde, S., Colaco, R., Audebert, F., Perrone, A., Zocco, A.
"Deposition of NbC thin films by pulsed laser ablation"
. Applied Physics A: Materials Science and Processing, vol. 69, no. 7, 1999, pp. S569-S571.
http://dx.doi.org/10.1007/s003390051475---------- VANCOUVER ----------
Duhalde, S., Colaco, R., Audebert, F., Perrone, A., Zocco, A. Deposition of NbC thin films by pulsed laser ablation. Appl Phys A. 1999;69(7):S569-S571.
http://dx.doi.org/10.1007/s003390051475