Conferencia
Abstract:
The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current. © 2008 The Royal Swedish Academy of Sciences.
Registro:
| Documento: | Conferencia |
| Título: | Ion emission in a dc titanium cathodic arc operated with oxygen |
| Autor: | Kleiman, A.; Márquez, A.; Kelly, H. |
| Ciudad: | Caracas |
| Filiación: | Instituto de Física del Plasma - CONICET - Departamento de Física, Universidad de Buenos Aires, Ciudad Universitaria, (1428) Buenos Aires, Argentina CONICET, Argentina |
| Palabras clave: | Cathodic arc; Glass substrates; Ion density; Ion emissions; Ion energies; Ion saturation current; Operation parameters; Oxygen ambient; Sticking coefficients; Working pressures; Cavity resonators; Deposition rates; Electric current measurement; Leakage (fluid); Oxygen; Probes; Titanium; Ions |
| Año: | 2008 |
| Volumen: | T131 |
| DOI: | http://dx.doi.org/10.1088/0031-8949/2008/T131/014005 |
| Título revista: | 12th Latin American Workshop on Plasma Physics |
| Título revista abreviado: | Phys Scr T |
| ISSN: | 02811847 |
| CODEN: | PHSTE |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Kleiman |
Referencias:
- Diebold, U., (2003) Surf. Sci. Rep, 48, p. 53
- Boxman R L, Sanders D M and Martin P J (eds) 1995 Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications (Park Ridge, NJ: I Noyes Publication); Kleiman, A., Márquez, A., Lamas, D.G., (2007) Surf. Coat. Technol, 201, p. 6358
- Brown, I.G., Godechot, X., (1991) IEEE Trans. Plasma Sci, 19, p. 713
- Grondona, D., Márquez, A., Minotti, F., Kelly, H., (2004) J. Appl. Phys, 96, p. 3077
- Boxman, R.L., Goldsmith, S., (1990) Surf. Coat. Technol, 43-44, p. 1024
Citas:
---------- APA ----------
Kleiman, A., Márquez, A. & Kelly, H. (2008) . Ion emission in a dc titanium cathodic arc operated with oxygen. 12th Latin American Workshop on Plasma Physics, T131.http://dx.doi.org/10.1088/0031-8949/2008/T131/014005
---------- CHICAGO ----------
Kleiman, A., Márquez, A., Kelly, H. "Ion emission in a dc titanium cathodic arc operated with oxygen" . 12th Latin American Workshop on Plasma Physics T131 (2008).http://dx.doi.org/10.1088/0031-8949/2008/T131/014005
---------- MLA ----------
Kleiman, A., Márquez, A., Kelly, H. "Ion emission in a dc titanium cathodic arc operated with oxygen" . 12th Latin American Workshop on Plasma Physics, vol. T131, 2008.http://dx.doi.org/10.1088/0031-8949/2008/T131/014005
---------- VANCOUVER ----------
Kleiman, A., Márquez, A., Kelly, H. Ion emission in a dc titanium cathodic arc operated with oxygen. Phys Scr T. 2008;T131.http://dx.doi.org/10.1088/0031-8949/2008/T131/014005
