Conferencia
Abstract:
In vacuum arcs of interest for film deposition the ion kinetic energy is of importance because it influences the coating properties. In this kind of discharge, the ions come out from the cathode spots with a high kinetic energy (20-150 eV). In the present work, we present measurements of vacuum arc ion energy distributions in a pulsed vacuum arc with a straight magnetic filter. A retarding field analyser (RFA) was used to perform the measurements that were carried out with a variable magnetic field strength (of the order of 10 mT). Since the interpretation of the results obtained from the RFA lies in the knowledge of the plasma and floating potential values, we have employed also Langmuir probes for determining those quantities. The obtained results for the ion kinetic energy are similar to those reported by other authors, but they were also found to be independent of the magnetic field strength. The electron temperature was also found to be independent of the magnetic field strength and of the axial position along the filter, indicating the absence of collisions. © 2008 The Royal Swedish Academy of Sciences.
Registro:
| Documento: | Conferencia |
| Título: | Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter |
| Autor: | Giuliani, L.; Grondona, D.; Kelly, H.; Minotti, F. |
| Ciudad: | Caracas |
| Filiación: | Instituto de Física del Plasma, CONICET-Departamento de Física, Universidad de Buenos Aires, C1428 EHA, cdad de Buenos Aires, Argentina |
| Palabras clave: | Axial positions; Cathode spot; Coating properties; Film deposition; Floating potentials; In-vacuum; Ion energy distributions; Ion kinetic energy; Magnetic field strengths; Pulsed vacuum arc; Vacuum arcs; Cavity resonators; Electric discharges; Electric power distribution; Electron energy loss spectroscopy; Kinetic energy; Magnetic fields; Magnetic filters; Magnetic separators; Vacuum; Vacuum deposition; Vacuum technology; Ions |
| Año: | 2008 |
| Volumen: | T131 |
| DOI: | http://dx.doi.org/10.1088/0031-8949/2008/T131/014032 |
| Título revista: | 12th Latin American Workshop on Plasma Physics |
| Título revista abreviado: | Phys Scr T |
| ISSN: | 02811847 |
| CODEN: | PHSTE |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Giuliani |
Referencias:
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Citas:
---------- APA ----------
Giuliani, L., Grondona, D., Kelly, H. & Minotti, F. (2008) . Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter. 12th Latin American Workshop on Plasma Physics, T131.http://dx.doi.org/10.1088/0031-8949/2008/T131/014032
---------- CHICAGO ----------
Giuliani, L., Grondona, D., Kelly, H., Minotti, F. "Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter" . 12th Latin American Workshop on Plasma Physics T131 (2008).http://dx.doi.org/10.1088/0031-8949/2008/T131/014032
---------- MLA ----------
Giuliani, L., Grondona, D., Kelly, H., Minotti, F. "Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter" . 12th Latin American Workshop on Plasma Physics, vol. T131, 2008.http://dx.doi.org/10.1088/0031-8949/2008/T131/014032
---------- VANCOUVER ----------
Giuliani, L., Grondona, D., Kelly, H., Minotti, F. Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter. Phys Scr T. 2008;T131.http://dx.doi.org/10.1088/0031-8949/2008/T131/014032
