Conferencia
Depine, R.A.; Kaufmann G.H. "On the use of cross-polarization measurements in the detection of grating asymmetries" (2001) 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications. 4419:773-775
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Abstract:
The differences in the curves of the zeroth order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to detect asymmetries in grating profiles. In this paper the cross-polarization efficiencies of metallic gratings with asymmetric grooves are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p → s and s → p conversion efficiencies tend to be undetectable for highly conducting materials, limiting, in principle, the application of this potential detection technique.
Registro:
| Documento: | Conferencia |
| Título: | On the use of cross-polarization measurements in the detection of grating asymmetries |
| Autor: | Depine, R.A.; Kaufmann G.H. |
| Ciudad: | Tandil |
| Filiación: | Grupo de Electromagnetismo Aplicado, Departamento de Física, Universidad de Buenos Aires, 1428 Buenos Aires, Argentina |
| Palabras clave: | Characterization techniques; Elipsometry; Gratings; Scatterometry; Computer simulation; Ellipsometry; Error analysis; Light polarization; Light reflection; Light scattering; Cross-polarization asymmetries; Grating asymmetries; Diffraction gratings |
| Año: | 2001 |
| Volumen: | 4419 |
| Página de inicio: | 773 |
| Página de fin: | 775 |
| DOI: | http://dx.doi.org/10.1117/12.437154 |
| Título revista: | 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications |
| Título revista abreviado: | Proc SPIE Int Soc Opt Eng |
| ISSN: | 0277786X |
| CODEN: | PSISD |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_0277786X_v4419_n_p773_Depine |
Referencias:
- Logofatu, P.C., Coulombe, S.A., Minhas, B.K., Mc-Neil, J.R., Identity of the cross-reflection coefficients for the symmetric surface-relief gratings (1999) J. Opt. Soc. Am. A, 16, pp. 1108-1114
- Li, L., Symmetries of cross-polarization diffraction coefficients of gratings (2000) J. Opt. Soc. Am. A, 17, pp. 881-887
- Vincent, P., Nevière, M., The reciprocity theorem for corrugated surfaces used in conical diffraction mountings (1979) Opt. Acta, 26, pp. 889-898
- Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction (1995) Opt. Commun., 117, pp. 223-227
- Depine, R., Valencia, C., Reciprocity relations for s-p polarization conversion in conical diffraction: Erratum (2001) Opt. Commun., 190, p. 391
- Chandezon, J., Dupuis, M., Cornet, G., Maystre, D., Multicoated gratings: A differential formalism applicable in the entire optical region (1982) J. Opt. Soc. Am. A, 72, pp. 839-846
- Li, L., Multilayer-coated diffraction gratings: Differential method of Chandezon et al. revisited (1994) J. Opt. Soc. Am. A, 11, pp. 2816-2828A4 - SPIE; Laseroptics SA (Argentina); Optical Society of America; International Commission for Optics; Spectra-Physics GmbH (Germany)
Citas:
---------- APA ----------
Depine, R.A. & Kaufmann G.H. (2001) . On the use of cross-polarization measurements in the detection of grating asymmetries. 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, 4419, 773-775.http://dx.doi.org/10.1117/12.437154
---------- CHICAGO ----------
Depine, R.A., Kaufmann G.H. "On the use of cross-polarization measurements in the detection of grating asymmetries" . 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications 4419 (2001) : 773-775.http://dx.doi.org/10.1117/12.437154
---------- MLA ----------
Depine, R.A., Kaufmann G.H. "On the use of cross-polarization measurements in the detection of grating asymmetries" . 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, vol. 4419, 2001, pp. 773-775.http://dx.doi.org/10.1117/12.437154
---------- VANCOUVER ----------
Depine, R.A., Kaufmann G.H. On the use of cross-polarization measurements in the detection of grating asymmetries. Proc SPIE Int Soc Opt Eng. 2001;4419:773-775.http://dx.doi.org/10.1117/12.437154
