Abstract:
We have performed an experimental investigation of the potential use of intense plasma jets produced in a repetitive pulsed capillary discharge (PCD) operating in methane gas, to irradiate Si (1 0 0) substrates. The surface modifications induced by the plasma jet using two different material inserts at the capillary end, graphite and titanium, are characterized using standard surface science diagnostic tools, such as scanning electron microscopy (SEM), energy-dispersive X-ray (EDX) analysis and Raman spectroscopy (RS). It has been found that the application of methane plasma jet results in the formation of sub-micron size carbon structures. It is observed that the resulting plasma irradiated surface morphologies are different, depending on the different material inserts used at the capillary end, at otherwise identical operational conditions. To investigate the species responsible for the observed surface changes in different material inserts to the capillary, optical-emission spectroscopy (OES) was recorded using a 300-1000 nm spectrometer. The OES results show the presence of H, CH and C 2 Swan band in the discharge plasma, which play a significant role in the formation of the carbon structures. © 2008 Elsevier B.V. All rights reserved.
Registro:
Documento: |
Artículo
|
Título: | Formation of sub-micron size carbon structures by plasma jets emitted from a pulsed capillary discharge |
Autor: | Bhuyan, H.; Favre, M.; Valderrama, E.; Avaria, G.; Wyndham, E.; Chuaqui, H.; Baier, J.; Kelly, H.; Grondona, D.; Marquez, A. |
Filiación: | Pontificia Universidad Catolica de Chile, Departamento de Fisica, Casilla 306, Santiago, 22, Chile Departamento de Fisica, Facultad de Ciencias Exactas y Naturales, Instituto de Fisica del Plasma (CONICET), Ciudad Universitaria, Pabellon 1, 1428 Buenos Aires, Argentina
|
Palabras clave: | Capillary discharge; Carbon coatings; Plasma jets; Capillary flow; Carbon; Electric discharges; Methane; Optical emission spectroscopy; Plasma jets; Scanning electron microscopy; Spectrometers; Capillary discharges; Carbon coating; Carbon structures; Energy dispersive x-ray; Experimental investigations; Operational conditions; Optical emission spectroscopies (OES); Pulsed capillary discharges; Fighter aircraft |
Año: | 2009
|
Volumen: | 255
|
Número: | 6
|
Página de inicio: | 3558
|
Página de fin: | 3562
|
DOI: |
http://dx.doi.org/10.1016/j.apsusc.2008.09.086 |
Título revista: | Applied Surface Science
|
Título revista abreviado: | Appl Surf Sci
|
ISSN: | 01694332
|
CODEN: | ASUSE
|
Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_01694332_v255_n6_p3558_Bhuyan |
Referencias:
- Rocca, J.J., Shlyaptsev, V., Tomasel, F.G., Cortazar, O.D., Hartshorn, D., Chilla, J.L.A., (1994) Phys. Rev. Lett., 73, p. 2192
- Klosner, M.A., Silfvast, W.T., (1998) Opt. Lett., 23, p. 1609
- Ben-Kish, A., Shuker, M., Nemirovsky, R.A., Fisher, A., Ron, A., Schwob, J.L., (2001) Phys. Rev. Lett., 87, p. 015002
- Niimi, G., Hayashi, Y., Nakajima, M., Watanabe, M., Okino, A., Horioka, K., Hotta, E., (2001) J. Phys. D: Appl. Phys., 34, p. 2123
- Tomassetti, G., Ritucci, A., Reale, A., Palladino, L., Reale, L., Kukhlevsky, S.V., Flora, F., Pikuz, T., (2002) E. Phys. J. D, 19, p. 73
- Andreic, Z., Ellwi, S.S., Pleslic, S., Kunze, H.J., (2005) Phys. Lett. A, 335, p. 430
- Kaganovish, D., Sasorov, P.V., Cohen, C., Zigler, A., (1999) Appl. Phys. Lett., 75, p. 772
- Bogen, P., Conrads, H., Gatti, G., Kohlhaas, W., (1968) J. Opt. Soc. Am. A, 58, p. 203
- Choi, P., Favre, M., (1998) Rev. Sci. Instrum., 69, p. 3118
- Sandolache, G., Fleurier, C., Bauchire, J.-M., Gentils, F., Zoita, V., (2001) Nukleonika, 46, pp. S21
- Caballero, L.S., Chuaqui, H., Favre, M., Mitchell, I., Wyndham, E., (2005) J. Appl. Phys., 98, p. 023305
- Kim, K., (2005) J. Crystal Growth, 283, p. 540
- Favre, M., Choi, P., Chuaqui, H., Kaufman, Y., Moreno, J., Wyndham, E., Zambra, M., (1995) IEEE Trans. Plasma Sci., 23, p. 221
- Geohegan, D.B., Puretzky, A.A., (1995) Appl. Phys. Lett., 67, p. 197
- Chrisey, D.B., Hubler, G.K., (1994) Pulsed Laser Deposition of Thin Films, , Wiley, New York
- Kukhlevsky, S.V., Cs Vér, J., Kaiser, L., Kozma, L., Palladino, Reale, A., Tomassetti, G., Giordano, G., (1999) Appl. Phys. Lett., 74, p. 77778
- Favre, M., Choi, P., Chuaqui, H., Mitchell, I., Wyndham, E., Leñero, A.M., (2003) Plasma Sources Sci. Technol., 12, p. 78
- Favre, M., Wyndham, E., Leñero, A.M., Suzuki, F., Valenzuela, J., Avaria, G., Ruiz, M., Choi, P., (2008) Plasma Sources Sci. Technol., 17, p. 024011
- Matthews, M.J., Pimenta, M.A., Dresselhaus, G., Dresselhaus, M.S., Endo, M., (1999) Phys. Rev. B, 59, p. 6585
- Ferrari, A.C., Robertson, J., (2000) Phys. Rev. B, 61, p. 14095
- Ilie, A., Ferrari, A.C., Yagi, T., Rodil, S.E., Robertson, J., (2001) J. Appl. Phys., 90
- Chhowalla, M., Teo, K.B.K., Ducati, C., Rupesinghe, N.L., Amaratunga, G.A.J., Ferrari, A.C., Roy, D., Milne, W.I., (2001) J. Appl. Phys., 90, p. 5308
- Casiraghi, C., Ferrari, A.C., Robertson, J., (2005) Phys. Rev. B, 72, p. 085401
- Abbas, G., Papakonstantinou, P., Iyer, G.R.S., Kirkman, I.W., Chen, L.C., (2007) Phys. Rev. B, 75, p. 195429
- Navrátil, Z., Trunec, D., Smd, R., Lazar, L., (2006) Czech. J. Phys., 56, pp. B944
- Benndorf, C., Joeris, P., Kroger, R., (1994) Pure Appl. Chem., 66, p. 1195
- Bou, P., Vandenbulcke, L., Herbin, R., (1992) Diam. Relat. Mater., 1, p. 933
- Zhou, Z.Y., Chen, G.C., Li, B., Askari, S.J., Tang, W.Z., Li, C.M., Song, J.H., Lu, F.X., (2007) Surf. Coat. Technol., 201, p. 4987
- de Poucques, L., Bougdira, J., Hugon, R., Henrion, G., Alnot, P., (2001) J. Phys. D: Appl. Phys., 34, p. 896
- Balestrino, G., Marinelli, M., Milani, E., Paoletti, A., Pinter, I., Tebano, A., Paroli, P., (1993) Appl. Phys. Lett., 62, p. 879
- Lee, T.Y., Han, J.H., Choi, S.H., Yoo, J.B., Park, C., Jung, Y.T., Yu, S.G., Kim, J.M., (2003) Diam. Relat. Mater., 12, p. 851
- Chen, M., Chen, C.M., Chen, C.F., (2002) Thin Solid Films, 420, p. 230
- Ferreira, N.G., Corat, E.J., Trava-Airoldi, V.J., Leite, N.F., (2000) Diam. Relat. Mater., 9, p. 368
- Obraztsov, A.N., Zolotukhin, A.A., Ustinov, A.O., Volkov, A.P., Svirko, Y., Jefimovs, K., (2003) Diam. Relat. Mater., 12, p. 917
- Zajickova, L., Elias, M., Jasek, O., Kudrle, V., Frgala, Z., Matejkova, J., Bursik, J., Kadlecikova, M., (2005) Plasma Phys. Control. Fusion, 47, pp. B655
- Riccardi, C., Barni, R., Fontanesi, M., Tosi, P., (2000) Chem. Phys. Lett., 329, p. 66
- Voevodin, A.A., Prasad, S.V., Zabinski, J.S., (1997) J. Appl. Phys., 82, p. 855
Citas:
---------- APA ----------
Bhuyan, H., Favre, M., Valderrama, E., Avaria, G., Wyndham, E., Chuaqui, H., Baier, J.,..., Marquez, A.
(2009)
. Formation of sub-micron size carbon structures by plasma jets emitted from a pulsed capillary discharge. Applied Surface Science, 255(6), 3558-3562.
http://dx.doi.org/10.1016/j.apsusc.2008.09.086---------- CHICAGO ----------
Bhuyan, H., Favre, M., Valderrama, E., Avaria, G., Wyndham, E., Chuaqui, H., et al.
"Formation of sub-micron size carbon structures by plasma jets emitted from a pulsed capillary discharge"
. Applied Surface Science 255, no. 6
(2009) : 3558-3562.
http://dx.doi.org/10.1016/j.apsusc.2008.09.086---------- MLA ----------
Bhuyan, H., Favre, M., Valderrama, E., Avaria, G., Wyndham, E., Chuaqui, H., et al.
"Formation of sub-micron size carbon structures by plasma jets emitted from a pulsed capillary discharge"
. Applied Surface Science, vol. 255, no. 6, 2009, pp. 3558-3562.
http://dx.doi.org/10.1016/j.apsusc.2008.09.086---------- VANCOUVER ----------
Bhuyan, H., Favre, M., Valderrama, E., Avaria, G., Wyndham, E., Chuaqui, H., et al. Formation of sub-micron size carbon structures by plasma jets emitted from a pulsed capillary discharge. Appl Surf Sci. 2009;255(6):3558-3562.
http://dx.doi.org/10.1016/j.apsusc.2008.09.086