Artículo

Estamos trabajando para conseguir la versión final de este artículo
Consulte el artículo en la página del editor
Consulte la política de Acceso Abierto del editor

Abstract:

The plasma-neutral gas structure generated in a copper cathodic arc operated with oxygen gas at a constant current level of 100 A has been investigated by employing a Langmuir spherical probe and a calorimetric technique. The plasma potential and electron temperature at several axial distances (between 10 and 25 cm) from the cathode surface and for different O2 pressure values (between 0.5 and 5 Pa) have been measured. A simplified one-dimensional model which incorporates the relevant atomic processes of the problem (charge-exchange, lateral diffusion loses, electron impact ionization, and dissociative recombination) is developed. This model allows calculating densities and drift velocities of the different species and, in particular, predicts the creation of a considerable number of metallic neutrals and gaseous ions. A comparison of the experimental ion saturation probe current and the heat source term derived from the calorimetric measurements with the corresponding quantities predicted by the model is performed. We found good agreement between theory and experiment, notwithstanding the fact that the physical quantities presented large variations, and the atomic reaction rates varied for several orders of magnitude, over the range of gas pressure and axial position values investigated. © 2001 American Institute of Physics.

Registro:

Documento: Artículo
Título:Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas
Autor:Lepone, A.; Kelly, H.; Márquez, A.
Filiación:Departamento de Física, Inst. de Física del Plasma, Universidad de Buenos Aires, 1428, Buenos Aires, Argentina
Año:2001
Volumen:90
Número:7
Página de inicio:3174
Página de fin:3181
DOI: http://dx.doi.org/10.1063/1.1397290
Título revista:Journal of Applied Physics
Título revista abreviado:J Appl Phys
ISSN:00218979
CODEN:JAPIA
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_00218979_v90_n7_p3174_Lepone

Referencias:

  • Boxman, R.L., Goldsmith, S., (1989) IEEE Trans. Plasma Sci., 17, p. 705
  • Davis, W.D., Miller, H.C., (1969) J. Appl. Phys., 40, p. 2212
  • Randhawa, H., (1988) Thin Solid Films, 167, p. 175
  • Demidenko, I.I., Lomino, N.S., Ovcharenko, V.D., Padalka, V.G., Poliakova, G.N., (1981) Sov. Phys. Tech. Phys., 22, p. 28
  • Martin, P.J., MacKenzie, D.R., Netterfield, R.P., Swift, P., Filipczuk, S.W., Muller, K.H., Pacey, C.G., James, B., (1987) Thin Solid Films, 153, p. 91
  • Bergman, C., (1988) Surf. Coat. Technol., 36, p. 243
  • Sakaki, M., Sakakibara, T., (1994) IEEE Trans. Plasma Sci., 22, p. 1049
  • Bilek, M.M.M., Martin, P.J., MacKenzie, D.R., (1998) J. Appl. Phys., 83, p. 2965
  • Kelly, H., Lepone, A., Márquez, A., (2001) J. Appl. Phys., 89, p. 1567
  • Book, D.L., Physics Vade Mecuum, , edited by H. L. Anderson American Institute of Physics, New York, 1981, Chap. 18
  • Lam, S.H., (1965) Phys. Fluids, 8, p. 73
  • Grondona, D., Kelly, H., Márquez, A., Minotti, F., (1998) J. Phys. D, 31, p. 3358
  • Kelly, H., Lepone, A., Minotti, F., (2000) J. Appl. Phys., 87, p. 8316
  • Keidar, M., Aharonov, R., Beilis, I.I., (1999) J. Vac. Sci. Technol. A, 17, p. 3067
  • Raizer, Y.P., (1991) Gas Discharge Physics, , Springer-Verlag, Berlin
  • Kutzner, J., Miller, H.C., (1989) IEEE Trans. Plasma Sci., 17, p. 688
  • Searcy, A.W., Ragone, D.V., Colombo, U., (1970) Chemical and Mechanical Behavior of Inorganic Materials, , Wiley-Interscience, New York

Citas:

---------- APA ----------
Lepone, A., Kelly, H. & Márquez, A. (2001) . Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas. Journal of Applied Physics, 90(7), 3174-3181.
http://dx.doi.org/10.1063/1.1397290
---------- CHICAGO ----------
Lepone, A., Kelly, H., Márquez, A. "Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas" . Journal of Applied Physics 90, no. 7 (2001) : 3174-3181.
http://dx.doi.org/10.1063/1.1397290
---------- MLA ----------
Lepone, A., Kelly, H., Márquez, A. "Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas" . Journal of Applied Physics, vol. 90, no. 7, 2001, pp. 3174-3181.
http://dx.doi.org/10.1063/1.1397290
---------- VANCOUVER ----------
Lepone, A., Kelly, H., Márquez, A. Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas. J Appl Phys. 2001;90(7):3174-3181.
http://dx.doi.org/10.1063/1.1397290