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Abstract:

Several results on the plasma-neutral gas structure generated in a dc cathodic arc are presented. The arc is operated at a current level of 100 A, with a copper cathode, and with oxygen gas at a pressure of 0.5 Pa. The employed diagnostics include spherical Langmuir probes and a calorimetric technique. The plasma potential, electron temperature, ion density, and ion kinetic energy are inferred at different axial positions in the discharge chamber. In order to explain the obtained experimental results, a simplified one-dimensional stationary model to describe the plasma-neutral gas structure is developed. A good agreement is found between the experimental data and the theoretical predictions when charge-exchange between metallic ions and neutral gas molecules and lateral diffusion loses of energetic particles are included in the theoretical treatment. © 2001 American Institute of Physics.

Registro:

Documento: Artículo
Título:Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen
Autor:Kelly, H.; Lepone, A.; Márquez, A.
Filiación:Inst. de Física del Plasma, Departamento de Física, Universidad de Buenos Aires, Ciudad Universitaria Pab. 1, 1428, Buenos Aires, Argentina
Año:2001
Volumen:89
Número:3
Página de inicio:1567
Página de fin:1572
DOI: http://dx.doi.org/10.1063/1.1331071
Título revista:Journal of Applied Physics
Título revista abreviado:J Appl Phys
ISSN:00218979
CODEN:JAPIA
Registro:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_00218979_v89_n3_p1567_Kelly

Referencias:

  • Randhawa, H., (1988) Thin Solid Films, 167, p. 175
  • Demidenko, I.I., Lomino, N.S., Ovcharenko, V.D., Padalka, V.G., Poliakova, G.N., (1981) Sov. Phys. Tech. Phys., 22, p. 28
  • Martin, P.J., MacKenzie, D.R., Netterfield, R.P., Swift, P., Filipczuk, S.W., Muller, K.H., Pacey, C.G., James, B., (1987) Thin Solid Films, 153, p. 91
  • Bergman, C., (1988) Surf. Coat. Technol., 36, p. 243
  • Sakaki, M., Sakakibara, T., (1994) IEEE Trans. Plasma Sci., 22, p. 1049
  • Bilek, M.M.M., Martin, P.J., MacKenzie, D.R., (1998) J. Appl. Phys., 83, p. 2965
  • Shkolnik, S.M., (1985) IEEE Trans. Plasma Sci., 13, p. 336
  • Bilek, M.M., Chhowalla, M., Weiler, M., Milne, W.I., (1996) J. Appl. Phys., 79, p. 1287
  • Fuchs, H., Mecke, H., Ellrodt, M., (1998) Surf. Coat. Technol., 98, p. 839
  • Grondona, D., Kelly, H., Márquez, A., Minotti, F., (1998) J. Phys. D, 31, p. 3358
  • Lam, S.H., (1965) Phys. Fluids, 8, p. 73
  • Raizer, Y.P., (1991) Gas Discharge Physics, , Springer, Berlin
  • Kelly, H., Márquez, A., Minotti, F., Ferro Fontán, C., (1998) J. Phys. D, 31, p. 1737
  • Golant, V.E., Zilinskij, A.P., Sacharov, S.E., (1983) Fundamentals Plasma Physics (in Italian), , MIR, Moscow
  • Kutzner, J., Miller, H.C., (1989) IEEE Trans. Plasma Sci., 17, p. 688
  • Kimblin, C.W., (1973) J. Appl. Phys., 44, p. 3074

Citas:

---------- APA ----------
Kelly, H., Lepone, A. & Márquez, A. (2001) . Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen. Journal of Applied Physics, 89(3), 1567-1572.
http://dx.doi.org/10.1063/1.1331071
---------- CHICAGO ----------
Kelly, H., Lepone, A., Márquez, A. "Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen" . Journal of Applied Physics 89, no. 3 (2001) : 1567-1572.
http://dx.doi.org/10.1063/1.1331071
---------- MLA ----------
Kelly, H., Lepone, A., Márquez, A. "Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen" . Journal of Applied Physics, vol. 89, no. 3, 2001, pp. 1567-1572.
http://dx.doi.org/10.1063/1.1331071
---------- VANCOUVER ----------
Kelly, H., Lepone, A., Márquez, A. Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen. J Appl Phys. 2001;89(3):1567-1572.
http://dx.doi.org/10.1063/1.1331071