Artículo
Mingolo, N.; González, C.R.; Martínez, O.E.; Rocca, J.J. "Stabilization of a cold cathode electron beam glow discharge for surface treatment" (1997) Journal of Applied Physics. 82(8):4118-4120
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Abstract:
We have demonstrated that the reproducibility of electron beam pulses generated by a high power, cold cathode glow discharge is greatly improved by adding a small continuous keep-alive discharge current. A current of the order of 200 μA was found to limit the shot to shot current variation to within 1.5%. This stabilization in turn reduces by an order of magnitude the fluctuations of the energy density deposited on the target, demonstrating a reliable energy source for surface treatment. © 1997 American Institute of Physics.
Registro:
| Documento: | Artículo |
| Título: | Stabilization of a cold cathode electron beam glow discharge for surface treatment |
| Autor: | Mingolo, N.; González, C.R.; Martínez, O.E.; Rocca, J.J. |
| Filiación: | Lab. de Haces Dirigidos, Depto. de Física, Universidad de Buenos Aires, Paseo Colón 850, 1063 Buenos Aires, Argentina Lab. de Electronica Cuantica, Depto. de Física, Universidad de Buenos Aires, 1428 Buenos Aires, Argentina Department of Electrical Engineering, Colorado State University, Fort Collins, CO 80523, United States |
| Año: | 1997 |
| Volumen: | 82 |
| Número: | 8 |
| Página de inicio: | 4118 |
| Página de fin: | 4120 |
| DOI: | http://dx.doi.org/10.1063/1.365723 |
| Título revista: | Journal of Applied Physics |
| Título revista abreviado: | J Appl Phys |
| ISSN: | 00218979 |
| CODEN: | JAPIA |
| Registro: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_00218979_v82_n8_p4118_Mingolo |
Referencias:
- Dugdale, R., (1975) J. Mater. Sci., 10, p. 896
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- Moore, C., Rocca, J.J., Johnson, J., Collins, G.J., (1983) Appl. Phys. Lett., 43, p. 290
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- Mingolo, N., Rocca, J.J., (1992) J. Mater. Res., 7, p. 1096
- Etcheverry, J.I., Mingolo, N., Rocca, J.J., Martínez, O.E., IEEE Trans. Plasma Sci., , in press
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Citas:
---------- APA ----------
Mingolo, N., González, C.R., Martínez, O.E. & Rocca, J.J. (1997) . Stabilization of a cold cathode electron beam glow discharge for surface treatment. Journal of Applied Physics, 82(8), 4118-4120.http://dx.doi.org/10.1063/1.365723
---------- CHICAGO ----------
Mingolo, N., González, C.R., Martínez, O.E., Rocca, J.J. "Stabilization of a cold cathode electron beam glow discharge for surface treatment" . Journal of Applied Physics 82, no. 8 (1997) : 4118-4120.http://dx.doi.org/10.1063/1.365723
---------- MLA ----------
Mingolo, N., González, C.R., Martínez, O.E., Rocca, J.J. "Stabilization of a cold cathode electron beam glow discharge for surface treatment" . Journal of Applied Physics, vol. 82, no. 8, 1997, pp. 4118-4120.http://dx.doi.org/10.1063/1.365723
---------- VANCOUVER ----------
Mingolo, N., González, C.R., Martínez, O.E., Rocca, J.J. Stabilization of a cold cathode electron beam glow discharge for surface treatment. J Appl Phys. 1997;82(8):4118-4120.http://dx.doi.org/10.1063/1.365723
