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Extreme ultraviolet lithography
2
"Design of a phase shifting interferometer in the EUV for high precision metrology" (2011) Capeluto, M.G.; Marconi, M.C.; Iemmi, C. Journal of Physics: Conference Series. 274(1)
"Nanopatterning in a compact setup using table top extreme ultraviolet lasers" (2008) Wachulak, P.W.;Capeluto, M.G.;Menoni, C.S. (...)Marconi, M.C. Opto-electronics Review. 16(4):444-450